期刊論文
| 學年 | 94 |
|---|---|
| 學期 | 2 |
| 出版（發表）日期 | 2006-06-01 |
| 作品名稱 | Fabricating a hollow optical waveguide for optical communication applications |
| 作品名稱（其他語言） | |
| 著者 | Lo, Shih-shou; Chen, Chii-chang; Hsu, Shih-chieh; Liu, Cheng-yi |
| 單位 | 淡江大學化學工程與材料工程學系 |
| 出版者 | Institute of Electrical and Electronics Engineers |
| 著錄名稱、卷期、頁數 | Journal of Microelectromechanical Systems 15(3), pp.584-587 |
| 摘要 | This work demonstrates a direct amorphous Si low-temperature wafer bonding technique to fabricate a semiconductor hollow waveguide with omni-directional reflectors for use in near infrared applications. The 2% dilute KOH solution was used to bond two ODR Si wafers with an amorphous Si thin film on the top of Si wafers. The resultant bonding interface is very thin, with a thickness that is close to that of the SiO2 layer in the ODR substrate. Hence, the far-field image shows that light is strongly confined in the waveguides. The propagation loss was reduced to 1.0±0.5 db/cm in the TE and TM modes, broadening the development of the semiconductor hollow waveguide with omni-directional reflectors for use in optical communication applications. |
| 關鍵字 | |
| 語言 | en |
| ISSN | 1057-7157 |
| 期刊性質 | 國內 |
| 收錄於 | |
| 產學合作 | |
| 通訊作者 | |
| 審稿制度 | 否 |
| 國別 | TWN |
| 公開徵稿 | |
| 出版型式 | ,電子版 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/53698 ) |