會議論文
| 學年 | 94 |
|---|---|
| 學期 | 1 |
| 發表日期 | 2006-01-18 |
| 作品名稱 | Design and fabrication of a diaphragm type thermo-buckled microactuators |
| 作品名稱（其他語言） | |
| 著者 | Wang, Jiun-Min; Lin, Hung-Hua; Lin, Yue-Jheng; Ou, Yu-Cheng; Yang, Lung-Jieh; Lin, Chii-Wann; Yang, Yao-Joe; Lin, Wei-Chih |
| 作品所屬單位 | 淡江大學機械與機電工程學系 |
| 出版者 | |
| 會議名稱 | Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on |
| 會議地點 | Zhuhai, China |
| 摘要 | This study presents a novel diaphragm type thermo- buckled microactuator with only a driving voltage of 3 V and under a working temperature far below 100degC. It's a sandwich structure composed of a platinum (Pt) resistor between two parylene films with different thickness. The platinum resistor is assigned as a heating source. Therefore, the parylene diaphragm with different thicknesses of top and bottom layers is heated by the embedded Pt resistor. The non-uniform temperature rise of the parylene diaphragm not only generates an out-of-plane thermo-buckling deformation, but also induces an asymmetric deflection inclined to upward or downward direction. The maximum displacement of the diaphragm is 0.4 mum and the cutoff frequency is 1000 Hz by a driving voltage of 3 V. |
| 關鍵字 | microactuator;parylene;thermo-buckled |
| 語言 | en |
| 收錄於 | |
| 會議性質 | 國際 |
| 校內研討會地點 | |
| 研討會時間 | 20060118~20060121 |
| 通訊作者 | |
| 國別 | CHN |
| 公開徵稿 | Y |
| 出版型式 | 紙本 |
| 出處 | o/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on, pp.873-876 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/92166 ) |