Near-Infrared Laser-Annealed IZO Flexible Device as a Sensitive H2S Sensor at Room Temperature
學年 108
學期 2
出版（發表）日期 2020-05-05
作品名稱 Near-Infrared Laser-Annealed IZO Flexible Device as a Sensitive H2S Sensor at Room Temperature
作品名稱（其他語言）
著者 Po-Yi Chang; Ching-Fu Lin; Samer El Khoury Rouphael; Ting-Hsuan Huang; Chang-Mao Wu; Dominique Berling; Ping-Hung Yeh; Chia-Jung Lu; Hsin-Fei Meng; Hsiao-Wen Zan; Olivier Soppera
單位
出版者
著錄名稱、卷期、頁數 ACS Applied Materials & Interfaces 12(22), p.24984−24991
摘要 A metal-oxide material (indium zinc oxide [IZO]) device with near-infrared (NIR) laser annealing was demonstrated on both glass and bendable plastic substrates (polycarbonate, polyethylene, and polyethylene terephthalate). After only 60 s, the sheet resistance of IZO films annealed with a laser was comparable to that of thermal-annealed devices at temperatures in the range of 200–300 °C (1 h). XPS, ATR, and AFM were used to investigate the changes in the sheet resistance and correlate them to the composition and morphology of the thin film. Finally, the NIR-laser-annealed IZO films were demonstrated to be capable of detecting changes in humidity and serving as a highly sensitive gas sensor of hydrogen sulfide (in ppb concentration), with room-temperature operation on a bendable substrate.
關鍵字 gas sensor;IZO;sol−gel;laser annealing;NIR;flexible
語言 en
ISSN 1944-8252
期刊性質 國外
收錄於 SCI
產學合作
通訊作者
審稿制度 否
國別 USA
公開徵稿
出版型式 ,電子版,紙本
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