Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique
學年 104
學期 1
出版（發表）日期 2015-10-23
作品名稱 Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique
作品名稱（其他語言）
著者 Chien-Fu Fong; Ching-Liang Dai; Chyan-Chyi Wu
單位
出版者
著錄名稱、卷期、頁數 Sensors 15(10), pp.27047-27059
摘要 A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of interdigitated electrodes, a sensitive film and a heater. The heater located under the interdigitated electrodes is utilized to provide a working temperature to the sensitive film. The sensitive film prepared by the sol-gel method is tin dioxide doped cadmium sulfide, which is deposited on the interdigitated electrodes. To obtain the suspended structure and deposit the sensitive film, the sensor needs a post-CMOS process to etch the sacrificial silicon dioxide layer and silicon substrate. The methanol senor is a resistive type. A readout circuit converts the resistance variation of the sensor into the output voltage. The experimental results show that the methanol sensor has a sensitivity of 0.18 V/ppm.
關鍵字 methanol sensor;tin dioxide;cadmium sulfide;heater
語言 en
ISSN 1424-8220
期刊性質 國外
收錄於 SCI
產學合作
通訊作者 Ching-Liang Dai
審稿制度 否
國別 CHE
公開徵稿
出版型式 ,電子版
相關連結

機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/109576 )

SDGS 優質教育,尊嚴就業與經濟發展,產業創新與基礎設施