Iron, nitrogen and silicon doped diamond like carbon (DLC) thin films: A comparative study
學年 104
學期 2
出版（發表）日期 2016-07-01
作品名稱 Iron, nitrogen and silicon doped diamond like carbon (DLC) thin films: A comparative study
作品名稱（其他語言）
著者 Ray, S.C.; Pong, W.F.; Papakonstantinou, P.
單位
出版者
著錄名稱、卷期、頁數 Thin Solid Films 610, p.42-47
摘要 The X-ray absorption near edge structure (XANES), X-ray photoelectron spectroscopy (XPS), valence band photoemission (VB-PES) and Raman spectroscopy results show that the incorporation of nitrogen in pulsed laser deposited diamond like carbon (DLC) thin films, reverts the sp3 network to sp2 as evidenced by an increase of the sp2 cluster and ID/IG ratio in C K-edge XANES and Raman spectra respectively which reduces the hardness/Young's modulus into the film network. Si-doped DLC film deposited in a plasma enhanced chemical vapour deposition process reduces the sp2 cluster and ID/IG ratio that causes the decrease of hardness/Young's modulus of the film structure. The Fe-doped DLC films deposited by dip coating technique increase the hardness/Young's modulus with an increase of sp3-content in DLC film structure.
關鍵字 Diamond like carbon (DLC);Fe-doped DLC;N-doped DLC;Si-doped DLC
語言 en
ISSN 0040-6090
期刊性質 國外
收錄於 SCI
產學合作 國內 國外
通訊作者
審稿制度 否
國別 NLD
公開徵稿
出版型式 ,紙本
相關連結

機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/109335 )