Electro-Hydro-Dynamic (EHD) Micropumps with Electrode Protection by Parylene and Gelatin | |
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學年 | 94 |
學期 | 1 |
出版(發表)日期 | 2005-09-01 |
作品名稱 | Electro-Hydro-Dynamic (EHD) Micropumps with Electrode Protection by Parylene and Gelatin |
作品名稱(其他語言) | |
著者 | Wang, Jiun-min; 楊龍杰; Yang, Lung-jieh |
單位 | 淡江大學機械與機電工程學系 |
出版者 | 淡江大學 |
著錄名稱、卷期、頁數 | 淡江理工學刊=Tamkang journal of science and engineering 8(3), pp.231-236 |
摘要 | This paper describes an ejection-type electro-hydro-dynamic (EHD) micropump using various types of polymers to protect the electrodes. The polymer layers of parylene and crosslinked gelatin were shown to protect the gold electrodes from electrolytic aging. The pump chip is packaged by the polydimethylsiloxane (PDMS) bonding technique. The results show that the polymer protection layers are successful in prolonging the operation lifetime. They can also provide the inner walls of channels with different surface properties for the working liquid to be driven through. |
關鍵字 | Parylene;Gelatin;Surface Modification;Electro-Hydro-Dynamic EHD |
語言 | en |
ISSN | 1560-6686 |
期刊性質 | 國內 |
收錄於 | |
產學合作 | |
通訊作者 | |
審稿制度 | 否 |
國別 | TWN |
公開徵稿 | |
出版型式 | ,電子版 |
相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/45669 ) |