Fabrication of SU-8 embedded microchannels with circular cross-section
學年 93
學期 1
出版（發表）日期 2004-08-01
作品名稱 Fabrication of SU-8 embedded microchannels with circular cross-section
作品名稱（其他語言）
著者 Yang, Lung-jieh; Chen, Yu-tang; Kang, Shung-wen; Wang, Yi-chung
單位 淡江大學機械與機電工程學系
出版者 Elsevier
著錄名稱、卷期、頁數 International journal of machine tools and manufacture 44(10), pp.1109-1114
摘要 This paper proposes a novel technique for fabricating microchannels in SU-8 by inserting optical-fibers as sacrificial moulds. The embedded circular microchannels, with inner diameters of 36, 80, and 125 μm (i.e., the diameters of optical-fibers), have been made successfully using a low-temperature fabrication process; where the SU-8 transparent negative-bone photo-resist is selected as the structure layer built in multilayers. Additionally, low-cost ultraviolet is applied as the exposure source to pattern the thin film photo-resist. Preliminary results show that the microchannels fabricated with the proposed technique have an average surface roughness (Ra) of the inner wall less than 10 nm and roundness deviation less than 7%. This paper also discusses the wetting behavior of the SU-8 surfaces before and after dipping in the hydrofluoric acid, and summarizes the relationship between the etching rate of sacrificial optical-fibers, etching temperature, concentration, and channel size. Finally, the etching rate of sacrificial optical-fibers vs. etching temperature subject to different concentrations and channel sizes is summarized and explained. This new fabrication technique of microchannel manufacture provides a new approach in selecting SU-8 for the structure material containing microchannels.
關鍵字 SU-8 microchannels;Optical-fibers;Surface roughness;Roundness deviations;Wetting behaviors;Etching rate
語言 en
ISSN 0890-6955
期刊性質 國內
收錄於
產學合作
通訊作者
審稿制度 否
國別 TWN
公開徵稿
出版型式 ,電子版
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