Substrate and BMT Inter Layer Effect on Pulsed Laser Deposited Barium Strontium Titanate Thin Films and Its Microwave Properties
學年 93
學期 1
發表日期 2004-11-17
作品名稱 Substrate and BMT Inter Layer Effect on Pulsed Laser Deposited Barium Strontium Titanate Thin Films and Its Microwave Properties
作品名稱（其他語言）
著者 Joseph, P.T.; Chu, Ying-Hao; Chen, Yi Chun; Cheng, Hsiu Fung; Lin, I-Nan
作品所屬單位 淡江大學物理學系
出版者 Hsinchu, Taiwan : Chinese Society for Material Science
會議名稱 中國材料科學學會：2004CSMS
會議地點 新竹市, 臺灣
摘要 We have deposited epitaxial Ba0.4Sr0.6TiO3 (BST) thin films via laser ablation on to SiO2 and Pt(Si) substrates with or without a Ba(Mg1/3Ta2/3)O3 (BMT) buffer layer. The structure and microwave dielectric properties of the films have been investigated with two different substrates and a BMT buffer layer. We have found that BMT buffer layer enhances the crystalline growth behavior and also effects dielectric properties of the BST film. The incorporation of BMT buffer layer engenders a change in the lattice parameter BST of the order of 0.01277 on SiO2 substrates and 0.01189 on Pt-Si Substrates. The evanescent microprobe (EMP) analysis reveals the close relation in the variation of microwave property of the deposited films allied with the variation in lattice parameter and the grain size/shape.
關鍵字 (Ba,Sr)TiO3;Ba(Mg1/3Ta2/3)O3;Microwave;Lattice parameter
語言 en
收錄於
會議性質 國際
校內研討會地點
研討會時間 20041117~20041118
通訊作者
國別 TWN
公開徵稿 Y
出版型式 紙本
出處 中國材料科學學會：2004CSMS論文集=Proceedings: the 2004 Annual Conference of the Chinese Society for Material Science, 3p.
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