Electronic and atomic structures of the Si-C-N thin film by x-ray-absorption spectroscopy and theoretical calculations
學年 87
學期 1
出版（發表）日期 1998-10-01
作品名稱 Electronic and atomic structures of the Si-C-N thin film by x-ray-absorption spectroscopy and theoretical calculations
作品名稱（其他語言）
著者 Chang, Y. K.; Hsieh, H. H.; Pong, Way-faung; Tsai, M.-H.; Lee, K. H.; Dann, T. E.; Chien, F. Z.; Tseng, P. K.; Tsang, K. L.; Su, W. K.; Chen, L. C.; Wei, S. L.; Chen, K. H.; Bhusari, D. M.; Chen, Y. F.
單位 淡江大學物理學系
出版者 College Park: American Physical Society
著錄名稱、卷期、頁數 Physical Review B (Condensed Matter) 58(14), pp.9018-9024
摘要 This study measures the x-ray-absorption spectra of a crystalline ~c!-Si-C-N thin film at the C and Si K edge using the sample drain current mode and at the N K edge using the fluorescence mode. A resonance peak resembling the C 1s core exciton in the chemical-vapor-deposition-diamond/Si is observed. In addition, a broad feature is found in the energy range between ;290 and 305 eV, which can be assigned to the antibonding C 2p-Si 3sp hybridized states and the C 2p-N 2sp hybridized states as well. The fact that the resonance peak is located ;1.5 eV below the C 1s ionization energy suggests that the Frenkel-type exciton model can appropriately describe the core exciton of carbon atoms in c-Si-C-N. Closely examining the N K edge near edge absorption spectra reveals similar features in both c-Si-C-N and a-Si3N4, indicating that nitrogen atoms generally have a similar local environment in these two materials. Moreover, results obtained from Si K-edge absorption spectra of c-Si-C-N demonstrate a proportional combination of local Si-N and Si-C bonds associated with the local tetrahedral C-Si-N3 arrangement as well as the long-range ordered atomic structure around Si atoms. Theoretical calculations using the first-principles pseudofunction method are also presented and compared with experimental data.
關鍵字
語言 en
ISSN 0163-1829 1095-3795
期刊性質 國外
收錄於 SCI
產學合作
通訊作者 Pong, W. F.
審稿制度
國別 USA
公開徵稿
出版型式 紙本 電子版
相關連結

機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/27776 )

機構典藏連結