X-ray absorption spectroscopy (XAS) study of dip deposited a-C:H(OH) thin films
學年 93
學期 1
出版（發表）日期 2004-08-01
作品名稱 X-ray absorption spectroscopy (XAS) study of dip deposited a-C:H(OH) thin films
作品名稱（其他語言）
著者 Ray, S.C.; Tsai, H.M.; Chiou, J.W.; Bose, B.; Jan, J.C.; Kumar, Krishna; Pong, W.F.; Dasgupta D.; Tsai, M. H.
單位 淡江大學物理學系
出版者 Temple Way: Institute of Physics (IOP)
著錄名稱、卷期、頁數 Journal of Physics Condensed Matter 16(32), pp.5713-5719
摘要 This work measures the C and O K-edge x-ray absorption near-edge structure (XANES) spectra of hydrogenated amorphous carbon (a-C:H) films deposited at various baking temperatures Tb (Tb = 300–500 °C at 50 °C). The C–H σ* peak related to the content of the sp2 graphite-like bonding in the C K-edge spectra was found to yield to the C–H π* peak related to the sp3 diamond-like bonding at high temperature (500 °C). We find that the intensities of both the sp2 and sp3 features in the C K-edge XANES spectra decrease with increase of Tb, which suggests an increase of the defect concentration with Tb. The intensities of the O K-edge XANES spectra are found to decrease with increase of Tb, which suggests thermally induced decomposition of carbonyl contaminants on the surface. The elemental analysis C/O (or O/C) ratio was obtained from XPS spectra and indicates that films are not hydrogenated amorphous carbon but rather oxyhydrogenated amorphous carbon thin films.
關鍵字 Absorption spectroscopy; Carbon; Decomposition; Friction; High temperature effects; Hydrogenation; X ray photoelectron spectroscopy; X ray spectroscopy; Carbon phases; X-ray absorption near-edge structures (XANES); X-ray absorption spectroscopy (XAS); Thi
語言 en
ISSN 0953-8984
期刊性質 國外
收錄於
產學合作
通訊作者 Ray, S.C.
審稿制度
國別 GBR
公開徵稿
出版型式 紙本
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