Effect of Nano-Ni Catalyst on the Growth and Characterization of Diamond Films by HFCVD
學年 98
學期 2
出版（發表）日期 2010-05-01
作品名稱 Effect of Nano-Ni Catalyst on the Growth and Characterization of Diamond Films by HFCVD
作品名稱（其他語言）
著者 Teng, Chien-chung; Ku, Feng-chi; Sung, Chien-min; Deng, Jin-pei; Chien, Su-fang; Song, Shin-min; Lin, Chhiu-tsu
單位 淡江大學化學學系
出版者 New York: Hindawi Publishing Corporation
著錄名稱、卷期、頁數 Journal of Nanomaterials 2010, 365614(8pages)
摘要 Four different catalysts, nanodiamond seed, nano-Ni, diamond powder, and mixture of nano-Ni/diamond powder, were used to activate Si wafers for diamond film growth by hot-filament CVD (HFCVD). Diamond crystals were shown to grow directly on both large diamond powder and small nanodiamond seed, but a better crystallinity of diamond film was observed on the ultrasonicated nanodiamond seeded Si substrate. On the other hand, nano-Ni nanocatalysts seem to promote the formation of amorphous carbon but suppress transpolyacetylene (t-PA) phases at the initial growth of diamond films. The subsequent nucleation and growth of diamond crystals on the amorphous carbon layer leads to generation of the spherical diamond particles and clusters prior to coalescence into continuous diamond films based on the CH3 addition mechanism as characterized by XRD, Raman, ATR/FT-IR, XPS, TEM, SEM, and AFM techniques. Moreover, a 36% reduction in surface roughness of diamond film assisted by nano-Ni catalyst is quite significant.
關鍵字
語言 en
ISSN 1687-4110
期刊性質 國外
收錄於 SCI
產學合作
通訊作者 Lin, Chhiu-tsu
審稿制度 是
國別 USA
公開徵稿
出版型式 紙本
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