Gas permeation in PDMS monitored by on-site pressure sensors
學年 98
學期 1
發表日期 2010-01-20
作品名稱 Gas permeation in PDMS monitored by on-site pressure sensors
作品名稱（其他語言）
著者 Yang, Lung-Jieh; Kao, A-Fu
作品所屬單位 淡江大學機械與機電工程學系
出版者 Institute of electrical and electronics engineers (IEEE)
會議名稱 Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
會議地點 Xiamen, China
摘要 This paper proposes a new methodology to detect the gas-leakage and the corresponding diffusion coefficient of PDMS. The authors use PDMS instead of Pyrex #7740 glass to seal the backside V-grooves of pressure sensor chips. The packaged sensor is put into a pressure testing machine and pressurized with CO<sub>2</sub> at 300 psi. By observing the output voltage, the time history for CO<sub>2</sub> permeating into cavity of the sensor was easily to be found. In this paper, the authors use several PDMS membranes with different thickness, from 45 to 2000 弮m, to package the sensors and investigate the gas-leakage of PDMS. The gas leaking through PDMS is shown to be governed by the diffusion mechanism, and the diffusion coefficients derived from CO<sub>2</sub> leaking history of PDMS chip frames is 2.2?10<sup>-9</sup> m /s, matched with the previous work. The thickness effect of PDMS on the diffusion mechanism is also addressed.
關鍵字 CO2;PDMS;permeation;pressure sensor
語言 en
收錄於 EI
會議性質 國際
校內研討會地點
研討會時間 20100120~20100123
通訊作者
國別 CHN
公開徵稿 Y
出版型式
出處 Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on, pp.352-355
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