| Gas Permeation in Polydimethylsiloxane in-situ Monitoring by Silicon Pressure Sensors | |
|---|---|
| 學年 | 97 |
| 學期 | 1 |
| 出版（發表）日期 | 2009-01-01 |
| 作品名稱 | Gas Permeation in Polydimethylsiloxane in-situ Monitoring by Silicon Pressure Sensors |
| 作品名稱（其他語言） | |
| 著者 | Yang, Lung-Jieh |
| 單位 | 淡江大學機械與機電工程學系 |
| 出版者 | Stafa-Zurich: Trans Tech Publications Ltd. |
| 著錄名稱、卷期、頁數 | Advanced Materials Research 74, pp.113-116 |
| 摘要 | This paper proposes a new way to detect the gas-leakage through PDMS. We use PDMS instead of Pyrex #7740 glass to seal the backside V-grooves of silicon pressure sensors. We put the packaged sensor into a pressurized chamber with CO2 at 300 psi. By observing the output voltage of the pressure sensor, the time history for CO2 permeating into the sensor cavity was easily found. In experiments, we use several PDMS membranes with different thickness, from 45 to 2000 μm, to package the pressure sensors and investigate the gas-leakage of PDMS. The gas leaking through PDMS is shown to be governed by diffusion mechanism, and the diffusion coefficients derived from CO2 leaking history is 2.2×10-9m2/sec, matched with the previous work. |
| 關鍵字 | Carbon Dioxide CO2;Diffusion Coefficient;Gas Leakage;PDMS;Polydimethylsiloxane |
| 語言 | en |
| ISSN | 1022-6680; 1662-8985 |
| 期刊性質 | 國外 |
| 收錄於 | EI |
| 產學合作 | |
| 通訊作者 | |
| 審稿制度 | |
| 國別 | CHE |
| 公開徵稿 | |
| 出版型式 | 紙本 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/60545 ) |
GoogleAnalytics