Growth, characterization, optical and X-ray absorption studies of nano-crystalline diamond films
學年 88
學期 2
出版（發表）日期 2000-03-01
作品名稱 Growth, characterization, optical and X-ray absorption studies of nano-crystalline diamond films
作品名稱（其他語言）
著者 Chen, L. C.; Wang, T. Y.; Yang, J. R.; 彭維鋒; Pong, W. F.
單位 淡江大學物理學系
出版者 Elsevier
著錄名稱、卷期、頁數 Diamond and Related Materials 9(3-6), pp.877-882
摘要 We report here the growth of thin diamond films, with an average grain size ranged from 3.6 nm to 5 μm, by microwave plasma enhanced chemical vapor deposition via different substrate pretreatment and varying methane fraction in the source gas. Specifically, the substrate pretreatment involved using two different grain sizes, 4 nm and 0.1 μm, of the diamond powder for ultrasonic agitation. Transmission electron microscopy, optical transmission spectra, and X-ray absorption spectra have been employed to characterize the resultant films. For each film, the grain size distribution was obtained by directly analyzing the dark-field images of the film. For films deposited with 0.1 μm diamond powder pretreatment, the grain size of the film decreased as the methane fraction increased. The opposite trend was observed for 4 nm diamond powder pretreated films. X-ray absorption spectra at the C K-edge showed clear bulk diamond excitonic and sp3 features with little evidence of sp2 bonding even for films with an average grain size as low as 3.6 nm. Furthermore, a blue shift of the exciton state and conduction band edge was observed with the decrease of the grain size of the film, indicating a quantum confinement effect. On the other hand, no direct relationship between the grain size of the film and the optical transmission was observed. The key parameter that dictated the optical transparency of the film was the surface roughness provided that the film maintained high sp3 content.
關鍵字 Microwave CVD;Nano-diamond film;Optical transmittance;Transmission electron microscopy;X-ray absorption
語言 en
ISSN 0925-9635
期刊性質 國內
收錄於
產學合作
通訊作者
審稿制度 否
國別 TWN
公開徵稿
出版型式 ,電子版
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