期刊論文
| 學年 | 108 |
|---|---|
| 學期 | 2 |
| 出版（發表）日期 | 2020-05-05 |
| 作品名稱 | Near-Infrared Laser-Annealed IZO Flexible Device as a Sensitive H2S Sensor at Room Temperature |
| 作品名稱（其他語言） | |
| 著者 | Po-Yi Chang; Ching-Fu Lin; Samer El Khoury Rouphael; Ting-Hsuan Huang; Chang-Mao Wu; Dominique Berling; Ping-Hung Yeh; Chia-Jung Lu; Hsin-Fei Meng; Hsiao-Wen Zan; Olivier Soppera |
| 單位 | |
| 出版者 | |
| 著錄名稱、卷期、頁數 | ACS Applied Materials & Interfaces 12(22), p.24984−24991 |
| 摘要 | A metal-oxide material (indium zinc oxide [IZO]) device with near-infrared (NIR) laser annealing was demonstrated on both glass and bendable plastic substrates (polycarbonate, polyethylene, and polyethylene terephthalate). After only 60 s, the sheet resistance of IZO films annealed with a laser was comparable to that of thermal-annealed devices at temperatures in the range of 200–300 °C (1 h). XPS, ATR, and AFM were used to investigate the changes in the sheet resistance and correlate them to the composition and morphology of the thin film. Finally, the NIR-laser-annealed IZO films were demonstrated to be capable of detecting changes in humidity and serving as a highly sensitive gas sensor of hydrogen sulfide (in ppb concentration), with room-temperature operation on a bendable substrate. |
| 關鍵字 | gas sensor;IZO;sol−gel;laser annealing;NIR;flexible |
| 語言 | en |
| ISSN | 1944-8252 |
| 期刊性質 | 國外 |
| 收錄於 | SCI |
| 產學合作 | |
| 通訊作者 | |
| 審稿制度 | 否 |
| 國別 | USA |
| 公開徵稿 | |
| 出版型式 | ,電子版,紙本 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/118826 ) |