期刊論文
| 學年 | 107 |
|---|---|
| 學期 | 1 |
| 出版（發表）日期 | 2018-08-01 |
| 作品名稱 | A Novel Method Guiding IC Manufacturing R&D Direction: Perspective from Knowledge Integration Innovation |
| 作品名稱（其他語言） | |
| 著者 | Han-Jen Niu; Chao-Jung Chang |
| 單位 | |
| 出版者 | |
| 著錄名稱、卷期、頁數 | International Journal of Innovative Computing, Information and Control, 14(4), p.1371-1388 |
| 摘要 | Integrated circuit (IC) manufacturing involves complex processes and may require months to complete. Thousands of messages will be generated during each process, and most messages can easily be identified and analyzed. However, ambiguous information remains as a kind of tacit knowledge that is one of the most essential issues of R&D management. Integrated innovation is an application of scientific/technological creative solutions to complex processes. This research uses a case study of a semiconductor company in Hsinchu Science Park in northern Taiwan. Traditional methods only yield the results inferred from explicit knowledge, and omit the results based on tacit knowledge. The integrated method can be designated as a clear direction for the R&D which uses the multivariate statistical analysis as virtual sensors. By involving Hotelling T2, and the principal component analysis (PCA), to generate specific results corresponding to the core of the high density plasma chemical vapor deposition (HDP CVD) equipment or process, eliminate inaccurate information using the experience rating in a 12-inch fab. This provides an approach that can guide the R&D engineers and illuminate the entire process. In sum, both process stabilization and cost savings are the major advantages of virtual sensors. |
| 關鍵字 | Integrated innovation method;R&D management;Virtual sensors;Knowledge management;Multivariate statistical analysis;IC manufacturing |
| 語言 | en |
| ISSN | 1349-4198 |
| 期刊性質 | 國外 |
| 收錄於 | EI |
| 產學合作 | |
| 通訊作者 | |
| 審稿制度 | 否 |
| 國別 | JPN |
| 公開徵稿 | |
| 出版型式 | ,電子版,紙本 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/115187 ) |