期刊論文
學年 | 106 |
---|---|
學期 | 2 |
出版(發表)日期 | 2018-03-01 |
作品名稱 | Sodium chloride concentration measurement by using doping/undoping poly-silicon nanowire device |
作品名稱(其他語言) | |
著者 | Chang-Yuan Chen; Cheng-Chih Hsu; Chyan-Chyi Wu; Ching-Liang Dai |
單位 | |
出版者 | |
著錄名稱、卷期、頁數 | International Journal of Materials Science and Engineering 6(1), p.18-22 |
摘要 | This work fabricates doping/un-doping poly-Si nanowire sensor with various lengths by using top-down technique for measuring salt concentration. Experimental results indicate that the resolution is proportional to the nanowire length and dopant concentration. But the sensitivity is inversely proportional to the length nanowire length. Moreover, the proposed sensor demonstrates 10 applications with similar current-time response and shows good repeatability. |
關鍵字 | Sodium chloride concentration;nanowire device;n-type dopant;reusable |
語言 | en |
ISSN | |
期刊性質 | 國外 |
收錄於 | SCI EI |
產學合作 | |
通訊作者 | |
審稿制度 | 是 |
國別 | USA |
公開徵稿 | |
出版型式 | ,電子版 |
相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/116036 ) |