期刊論文
| 學年 | 98 |
|---|---|
| 學期 | 2 |
| 出版（發表）日期 | 2010-04-01 |
| 作品名稱 | Cobalt oxide nanosheet and CNT micro carbon monoxide sensor integrated with readout circuit on chip |
| 作品名稱（其他語言） | |
| 著者 | Dai, Ching-liang; Chen, Yen-chi; Wu, Chyan-chyi; Kuo, Chin-fu |
| 單位 | 淡江大學機械與機電工程學系 |
| 出版者 | Basel: MDPI AG |
| 著錄名稱、卷期、頁數 | Sensors 10(3), pp.1753-1764 |
| 摘要 | The study presents a micro carbon monoxide (CO) sensor integrated with a readout circuit-on-a-chip manufactured by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process. The sensing film of the sensor is a composite cobalt oxide nanosheet and carbon nanotube (CoOOH/CNT) film that is prepared by a precipitation-oxidation method. The structure of the CO sensor is composed of a polysilicon resistor and a sensing film. The sensor, which is of a resistive type, changes its resistance when the sensing film adsorbs or desorbs CO gas. The readout circuit is used to convert the sensor resistance into the voltage output. The post-processing of the sensor includes etching the sacrificial layers and coating the sensing film. The advantages of the sensor include room temperature operation, short response/recovery times and easy post-processing. Experimental results show that the sensitivity of the CO sensor is about 0.19 mV/ppm, and the response and recovery times are 23 s and 34 s for 200 ppm CO, respectively. |
| 關鍵字 | micro carbon monoxide sensor; cobalt oxide film; readout circuit |
| 語言 | en |
| ISSN | 1424-8239 1424-8220 |
| 期刊性質 | 國外 |
| 收錄於 | SCI |
| 產學合作 | |
| 通訊作者 | Dai, Ching-liang |
| 審稿制度 | |
| 國別 | CHE |
| 公開徵稿 | |
| 出版型式 | 電子版 |
| 相關連結 |
機構典藏連結 ( http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/65287 ) |